Product Features
- * Ultra-high purity in-line high flow gas filter
- * All 316L Stainless steel constructions
- * High temperature and dynamic pressure applications
- * Compact size and variable end connections
Specification
|
Particle Removal Size |
≥ 0.0025 ㎛ |
|
|---|---|---|
|
Retention |
≥ LRV 9 of Particle down to 0.0025 ㎛ |
|
|
Rated Flow |
50 SLPM |
|
|
150 SLPM |
||
|
300 SLPM |
||
|
600 SLPM |
||
|
1300 SLPM |
||
|
Materials |
Filter element |
316L Stainless Steel |
|
Electro polished housing |
||
|
Element Operating Conditions |
Max. inlet pressure |
21 MPa (210 kfg/㎠) at 20 °C |
|
Max. differential pressure |
15 MPa (153 kfg/㎠) at 20 °C |
|
|
Max. operating temperature |
460 °C (Inert gas) |
|
|
He Leak Rating |
1 x 10-10 atm·cc/sec |
|
|
Surface Finish Interior |
≤ Ra 5 μinch |
|
Performance Data
Ordering Information
|
Product |
Series |
Rated Flow (SLPM) |
Connection Size |
Connection Type |
|||
|---|---|---|---|---|---|---|---|
|
FLT (Filter) |
HSF |
High Flow Stainless Steel Filter |
50 |
04 |
1/4” |
MV |
Male |
|
150 |
06 |
3/8” |
LOK |
Lok |
|||
|
300 |
08 |
1/2” |
MR |
MR |
|||
|
600 |
12 |
3/4” |
|||||
|
1300 |
|||||||
Dimension
|
Ordering No. |
A (㎜) |
B (㎜) |
C (㎜) |
D (㎜) |
|---|---|---|---|---|
|
FLT-HSF50-04MV |
84 |
15.5 |
19.05 |
18 |
|
FLT-HSF150-04MV |
84 |
15.5 |
38.1 |
27 |
|
FLT-HSF150-08MV |
84 |
15.5 |
38.1 |
27 |
|
FLT-HSF300-04MV |
127 |
15.5 |
38.1 |
27 |
|
FLT-HSF300-08MV |
127 |
15.5 |
38.1 |
27 |
|
FLT-HSF600-04MV |
127 |
15.5 |
38.1 |
27 |
|
FLT-HSF600-08MV |
127 |
15.5 |
38.1 |
27 |
|
FLT-HSF1300-16MR |
378 |
64 |
89.1 |
41.3 |
